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SiC外延缺陷
中国粉体网讯 近日,新加坡A-STAR微电子研究所和法国SOITEC发表了一篇文章,题为《SiC外延片迈向无缺陷》。我们经常说的SiC外延,指的是SiC材料的衬底上生长一层具有特定晶体取向的SiC单晶薄膜的过程。其可以制造各 [更多] ...
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