One of the main challenges is the potential damage to the sample caused by the high-energy ion beam. Ion implantation, amorphization, and gallium contamination can occur during the milling process, ...

Hiden Analytical is revolutionizing the field of semiconductor process development and monitoring with their state-of-the-art ion implantation and diffusion techniques, combined with the highly ...

March 12, 2025 /PRNewswire/ -- Axcelis Technologies, Inc. (Nasdaq: ACLS) a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that its Board of ...

The He-Si co-deposition process ... atom implantation played a key role, as early analyses suggested that Cu atom diffusion into the Si layer enhanced conductivity and improved lithium-ion transport.