Researchers from Lam Research, the University of Colorado Boulder, and Princeton Plasma Physics Laboratory (PPPL) investigated ways to speed up the cryogenic reactive ion etching process for 3D NAND ...

To improve data storage, researchers are perfecting 3D NAND flash memory, which stacks cells to maximize space. Researchers ...

Particle detectors play a crucial role in our understanding of the fundamental building blocks of the universe. They allow ...

To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

Detecting high-energy particles is essential for exploring the fundamental structure of matter. Particle accelerators propel ...

This groundbreaking technique, also referred to as MacEtch or MACE, provides ultra-high anisotropy etching that’s free from damage. It is an innovative approach that effectively addresses the ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a plasma made from hydrogen fluoride.

Advanced Research Institute of Multidisciplinary Sciences, Beijing Institute of Technology, Beijing 100081, China School of Integrated Circuits and Electronics, Beijing Institute of Technology, ...