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The Ion Beam Milling ion-etching process is vacuum based and is dependent on precise identification of interlayer breakthrough through multiple stacked thin-film layers each of perhaps only a few ...
The Helios 5 Hydra DualBeam (plasma focused ion beam scanning electron microscope, PFIB-SEM) from Thermo Scientific has the ability to provide four different ion species as the primary beam. This ...
In this paper, the use of an oxygen primary ion source for positive and negative secondary ion detection is being investigated on an in-line SIMS tool. We evaluate sensitivity levels of detecting ...
Future IAEA ion beam facility project Countries around the world can benefit from the use of ion and electron beams, and the IAEA is planning to establish its own state-of-the-art tandem ion beam ...
These were originally gallium FIBs, moving to plasma FIBs more recently. The most recent tool is the broad argon beam, also called the broad ion beam, because it is possible to use ions other than ...