Abstract: Based on the electrostatic tuning theory model of micro hemisphere resonant gyroscope (MHRG) with frequency split, explores the variation law of frequency split with tuning voltage, ...

In response, ATE, wafer probe, and contactor vendors are introducing some innovative approaches and test procedures that can ensure robust power delivery to ATE pro... » read more ...

Finally the rays bounce from the mask onto a silicon wafer coated with light-sensitive ... To shrink chip features even more, ASML turned to EUV light, with a wavelength of 13.5nm.