In e-beam lithography, or EBL, shapes are drawn onto a wafer using an electron beam in a vacuum chamber. This is a slow process compared to optical lithography, as used in mass production, but it ...

A new method in electron microscopy enables sub-20-picometer targeting of individual atoms without prior exposure, opening ...

In e-beam lithography, or EBL, shapes are drawn onto a wafer using an electron beam in a vacuum chamber. This is a slow process compared to optical lithography, as used in mass production, but it ...

A groundbreaking achievement in particle physics has been made at the SLAC National Accelerator Laboratory in Menlo Park, California. Scientists at SLAC have created an electron beam with an ...

Fraunhofer FEP has developed a new roll-to-roll production process for manufacturing metal-on-polymer current collectors.

The Elionix ELS-G100 electron beam lithography system produces a highly stable beam with a diameter as small 1.8nm, using acceleration voltages of up to 100kV and high beam currents. This allows fine ...

Electron-beam lithography (e-beam lithography) is a high-precision nanofabrication technique used to produce patterns with features as small as a few nanometers. By using a focused beam of electrons ...

Electron Beam Exposure: The heart of EBL involves a machine with a special electron gun. This gun generates a beam of electrons that are then focussed to a tiny spot using lenses and apertures.

The JEOL JSM-6500F is a Field Emission Scanning Electron Microscope (FESEM) w/Electron Beam Lithography attachment, and Nanometer Pattern Generation Systems (NPGS). It offers high resolution images of ...

For decades, traditional lithography techniques—such as electron beam lithography and nanoimprinting—have struggled to meet the demand for ultra-fine, high-aspect-ratio structures in general ...

Today we're looking at Electron Beam Lithography using a scanning electron microscope Lauren Sánchez’s Pink Diamond ...

Beam delivery. According to Emma, generating extremely compressed electron beams is one of the most important challenges facing accelerator and beam physicists today. “It was interesting for us to ...