In 2022, fearful as always of China's global economic ascent, the US enacted its first broad-based set of export restrictions ...

ASML is the sole producer of cutting-edge EUV lithography machines for advanced 3nm chip manufacturing. How secure is that ...

Achieving integration of semiconducting and superconducting qubits with full industrial 300-mm wafer fabrication.

Few would expect the future of artificial intelligence to depend on Eindhoven, a quiet Dutch town. Yet just beyond its ...

State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China ZJU-Hangzhou Global Scientific and Technological ...

ASML claims these are the finest lines ever printed and set a world record for resolution on an EUV lithography scanner. The images of the lines were printed after the tool’s optics, sensors and ...

Sensitivity, meanwhile, measures the amount of energy needed to activate the photoacid generator molecules. Resist sensitivity limits the throughput of an EUV exposure system, and is therefore a major ...

For example, one paper described improvement in the peak reflectivity of the multilayer mirrors used in EUV optics from 69.5% to 71.2%. This may appear to be a small improvement, but because light is ...