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中国科学院
26 天
科学家提出制备无机界面钝化层的新型可溶液法
本研究中,该团队联合芬兰埃博学术大学教授Ronald Österbacka,开发出原位转化的无机SiO x N y 钝化层。该钝化层通过室温下将溶液法沉积的全氢聚硅氮烷(PHPS)进行原位转化获得。相比于常见的真空物理制备方法如原子层沉积,这一方法与湿法印刷工艺更兼容。
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