Capacitive differential pressure sensors have received widespread attention in recent years. This paper reports a MEMS capacitive differential pressure sensor with low temperature sensitivity and high ...

We describe the design and fabrication of a resonant absolute MEMS pressure sensor using a semi-custom fabrication process. We selected a double anchored Double-Ended Tuning Fork (DETF) resonator for ...

Here, we report a highly sensitive pressure sensor matrix based on a piezoresistive cellulose/single-walled carbon nanotube-entangled fiber network, which forms its own porous structure enabling a ...