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美国开发新一代BAT激光器：远超现有EUV光刻 效率提升10倍！铥激光器（thulium laser），采用大孔径铥 (BAT：Big Aperture Thulium ) 激光技术，与当前行业标准二氧化碳 (CO2) 激光器相比可将EUV光源效率提高约10 倍 ...
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