One of the main challenges is the potential damage to the sample caused by the high-energy ion beam. Ion implantation, amorphization, and gallium contamination can occur during the milling process, ...

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor ...

Hiden Analytical is revolutionizing the field of semiconductor process development and monitoring with their state-of-the-art ion implantation and diffusion techniques, combined with the highly ...

The He-Si co-deposition process ... atom implantation played a key role, as early analyses suggested that Cu atom diffusion into the Si layer enhanced conductivity and improved lithium-ion transport.