For example, oil and grease cannot be used in the machining of any part or component within the vacuum chamber, even down to the smallest screw. There is also the question of how to generate EUV ...

First, because EUV light is absorbed by air (in contrast with 193 nm light), the entire optical system, from source to wafer, must be enclosed in a near-vacuum environment. Second, because EUV ...

Generating and manipulating tin droplets also requires power. In addition, vacuum requirements to prevent the absorption of EUV light by air add to the overall energy use. Finally, as advanced ...